"Is this the plan you designed?"

Wang Zhongjun flipped through the documents in his hand, and couldn't help frowning while looking.

"Have you considered the workload in this using isotropy of corrosive agents?"

"Using nitric acid and hydrofluoric acid that can control the erosion rate, we have calculated the possible ratios and at least thousands of experiments are required."

Zhong Dahua's voice did not fluctuate much. After Wu Mu proposed this idea last night, they had already collected relevant information through the agency, but the situation was a bit unexpected.

There is no technology related to this idea in the US database.

In fact, since the 1980s, wet etching has been a backward technology in the United States. With the improvement of process technology, the mainstream industry is now better in dry etching, because dry etching has better anisotropy, and the chip yield is naturally higher.

In other words, on the wet etching route, the industry has changed the route before it reaches its end.

Americans have relatively advanced technology. After the 1980s, process technology developed to the micron level. In order to overcome the shortcomings of wet etching, Applied Materials Company directly launched the PVD technology for dry etching and simply opened a new stove! Dry etching uses plasma to directly impact the wafer, changing from chemical reactions to physical reactions, and there is no problem of isotropy.

Of course, the physical etching of dry etching could not meet the needs later, so the industry picked up wet etching again. But that was also a wet etching based on PECVD after ionizing the chemical corrosive agent using an ionization machine.

The problem of anisotropy was solved by Americans as early as the 1980s.

Now that Zhong Dahua and Wu Mu want to go back, they actually chose a path full of thorns and were walking.

If you want to refer to and learn from it, there is no precedent to follow. In this way, it is inevitable that people will feel a little psychologically upset.

However, Zhong Dahua could not see any suspicion or anxiety on his face. Facing the workload required by thousands of experiments, it seemed like he was talking about where to buy vegetables after get off work.

"Thousands of experiments? I don't think enough!"

Wang Zhongjun shook his head and snorted: "This is the number of experiments you need to calculate the ratio and time control, but have you ever thought about it? What we want is not an ordinary needle tip, but a 50-nanometer-wide needle tip! In addition to time and ratio, even a slight faint air flow can make your experimental results deviate. In addition, temperature, humidity, air impurities, and these are still thought-provoking interferences. When you are doing the experiment, you will find that more interference sources that you have never thought of will appear... These must be eliminated one by one. Can you guarantee the results of a thousand sets of experiments?"

"I promise...can't."

Zhong Dahua's voice still did not fluctuate, and he said calmly: "But there is no precedent for silicon probes, and we can't even produce atomic force microscope probes ourselves. But this project only gave us two months, and there was no possibility of implementing it step by step."

"To be honest, I think Wu Mu's idea is simply tailor-made for us. Although wet etching probes have no mature technology to learn from, the performance data of various corrosion agents is still very rich. The biggest advantage of this idea is that it does not require past foundations and is very suitable for the leapfrog development of technology. Whether it is submicron or micronomial, 50 nanometers or even 10 nanometers, or even 1 nanometer probes one day, you can find the parameters that can be realized by increasing your investment."

“I admit we have the ingredients for betting.”

"This route has been successful. We can put aside the current technical route and take a completely different nanograting manufacturing system."

"It's really not realized, but when we talk about science, it has the potential to succeed in theory."

"And only our new science can achieve this possibility."

"Oh, how do you say this?" Wang Zhongjun was actually satisfied with this idea. It was indeed difficult, but it was possible to achieve it.

But if we only have new science to achieve, why is this? Is Hu Wenhai handsome?

“I have a basis for this.”

Zhong Dahua said it was true that Wang Zhongjun was obviously more interested.

"When searching for relevant literature, we found a situation. In fact, compared with the American database, the data required in the program comes from the data center of the institute."

"In the past decade, there are more research data on the proportion of various corrosion fluids, our own research institute databases."

"In fact, this is not difficult to understand, because we know that the process of integrated circuits has now entered the submicron level, and wet etching has long been unable to meet the demand. However, in power semiconductors, the smaller the process, the better. In fact, the process of IGCT is basically above 3 microns, and the process of IGBT is also between 1 and 3 microns."

"After the industry generally upgraded dry etching, Xinke, as the main manufacturer of power semiconductors, is actually still using wet etching in large quantities, and has been investing in improvements and upgrading in wet etching technology for many years."

"The production and experimental data accumulated from this have long exceeded the international advanced level."

Zhong Dahua and Wang Zhongjun didn’t know that this was the advance planning dividend brought by Hu Wenhai.

IGBTs are power semiconductors. Not only does it not require following the process of digital semiconductors, but even smaller processes are not more performance-friendly. Later semiconductor processes have entered less than 10 nanometers, and many IGBT processes are still only 0.5 microns. Do you believe this?

In the later years, China's semiconductor industry still had a place for wet etching. Because most chips on the market do not actually require the most advanced processes. For example, most low-cost ICs, discrete devices and microelectronic mechanical equipment still use wet etching.

Although wet etching cannot do fine work, it also has its own advantages. For example, a specific corrosive agent can specifically corrode a certain material, only corrode the material without harming the photoresist, and does not harm the structure already formed in the lower layer. This selective etching characteristic makes it more safe under the rough process and ensures that the substrate will not be damaged.

With the continuous investment of Xinke in recent years, China has almost done a lot of data and data that exceeds the industry level.

As Zhong Dahua said, if we want to follow the wet etching route, then Xinke is really unique.

Wang Zhongjun finally took a look at the information in his hand and nodded heavily.

"Okay, wait, I'll report to Dean Ni."

...

With a creaking sound, a military vehicle stopped in the square in front of the Semiconductor Institute building, followed by a series of buses, cars, and even jeeps.

"Get out of the car, the whole team!"

A group of soldiers jumped out from behind the military card and quickly lined up in an orderly manner. A squadron leader then turned around and ran towards Wang Zhongjun.

"Is it Comrade Wang Zhongjun? I am from the Third Squadron of the Armed Police Detachment, and my surname is Zhang."

"Fortunately, I'm not disappointed. This is the researcher from other research units you named. Finally, it was delivered safely as scheduled!"

Wang Zhongjun withdrew his gaze toward the convoy and shook hands with him: "Captain Zhang, you are here so fast, thank you for your hard work!"

"It's not hard for Comrade Wang, we have a long time to spend together next, so we don't need to be so polite."

"Then our next safety will be entrusted to Captain Zhang."

Wang Zhongjun's plan was reported, as the most important project at present, it will of course receive unconditional support.

There are many experiments and tight time. It is almost impossible to complete the experiment in two months by relying on the semiconductor institute. If you want to develop a key problem, you can transfer people from outside to share the work, and you must pay attention to the confidentiality issue.

Captain Zhang and his detachment not only protect their safety, but also have the responsibility for surveillance and isolation.

Under the current situation, grating projects are crucial and no one dares to take any risk.

The people who followed him were all the backbone personnel who were recruited by Wang Zhongjun himself from major research institutes near Xiucheng. Such a large number of people suddenly arrived, and the logistics personnel of the semiconductor institute were so busy.

But this was obviously worth the money. Soon these people assigned experimental tasks and then started working in an orderly manner with graduate students arrested from universities in Xiucheng.

Some people have a solution, but fortunately, the experimental conditions are not particularly demanding under this idea. The clean room in the semiconductor institute is standard, and other laboratory projects have made way for grating projects, and more atomic force microscopes were quickly sent over.

Atomic force microscopes are still rare in China. Fortunately, this thing is not an embargo material under the Wassenah Agreement. Xinke puts a vest to purchase internationally. After the experiment is completed, it can be processed with second-hand to other domestic research institutes at a low price.

You lend me one today, but tomorrow I can’t repay you two at the worst.

In this way, people, money and things quickly gather, and the Institute of Semiconductors is about to fight a small scientific research battle.

Although the pain was a little bit painful, the researchers who knew and didn’t know the inside story did not complain. They had organizational care at home, and it only took two months. After doing the experiment, the effort of the kung fu passed.

And in the past two months, the changes in the international situation can be said to have taught everyone a lesson.

Not only do you have to be beaten if you fall behind, but you don’t have to be beaten first! It’s impossible to say that you don’t have to hold your breath in the country because of this.

I want to teach Americans a lesson, and I want to say to them loudly, "NO! Go and Damn!"

With this emotion, time has entered early autumn from midsummer. In October, the coldest temperature in Jiuquan has reached below zero, but when it was supposed to be late at night, a convoy from all over the country met here enthusiastically.

No matter how bitter the wind is, it cannot extinguish their enthusiasm!

Wang Zhongjun jumped out of the car and hugged the box in his hand tightly. This was the scene before him.
Chapter completed!